Heater Parts

Features

ZENITHWORLD develops and designs heater parts used in semiconductor CVD/WET equipment according to heater block designs and customer needs. Its heater manufacturing technology gives compatibility among parts by applying AL Block manufacturing technology and the concept of tolerance of heater assembly.
Parts are manufactured within the standard tolerance of part size and surface roughness, taking into account all possible problems arising from shrinkage/expansion due to thermal expansion. The company utilizes its technology know-how that enables manufacturing with less than 1% of temperature uniformity by factoring in the clearance of two dissimilar metals during assembly.

Heater production process chart

Heater production technology

• Design technology
  • Design for even temperature/vacuum distribution
  • Design for process characteristics
• Processing technology
  • Global flatness of heater surface
  • Tolerance control for even temperature distribution and expanded heater life
  • Transformation control technology
• Welding technology
  • E-BEAM Technology to prevent leakage and deformation before/after welding
  • Welding bid assurance technology
• Assembly technology
  • Assembly technology is very importance to ensure products’ reliability. Jigs and element cleaning technologies for assembly
  • Works to ease pre/post processes
    

Heater product