LCD Parts

Features

ZENITHWORLD is running the standard micro contamination control process for LCD parts made from the dry etch/sputter process, in order to meet customer needs. In every part of the contamination control process, the company applies its sophisticated cleaning technology and expertise.

Cleaning Process

Major cleaning parts for DRY ETCH are; Focus Ring, Y2O3 Coating Focus Ring, Shield Ceramics, Anodizing Coating dual Wall, Anodizing Coating Baffle Plate and other anodizing parts.

Upper Electrode

Focus Ring

Shield Ceramic

Baffle plate

Major Sputter cleaning parts; Ground Shield,MASK ,Susceptor and Nozzle

Gorund Shield

Mask Base

Susceptor

Nozzle